Silicon characterization





Thu, 16 Jul 2009 14:32:56 -0600

Ulvac Rolls PECVD for Tandem PV Cells - 2009-06-25 09:24:13 CDT ...

by Silicon characterization  @ Thu, 16 Jul 2009 14:32:56 -0600
Ulvac Inc. (Chigasaki, Japan) has developed a plasma-enhanced chemical vapor deposition (PECVD) system for microcrystalline silicon (μc-Si) deposition, aimed at tandem thin-film ...